Parametric optimization and analysis of pressure sensor chip membrane using design of experiments (DOE)

Abstract

MEMS offers the uses of the membrane in various applications such as pressure sensors and micro-pumps. The working principle of all these devices is based on the deflection of the membrane due to the application of force. Piezoresistive pressure sensors are simpler to integrate with electronics, and they are inherently more linear than capacitive pressure sensors. The parameter optimization of the membrane is the prime challenge for achieving the best performance of the device. In this paper, the parametric optimization is incorporated for aspect ratio in terms of excellent sensitivity and linearity with the help of the design of experiments (DOE) and ANSYS. It is observed that the aspect ratio of 0.04 gives the maximum deformation with the elastic behaviour, among other sample points of the design.