Development of high precision glass scale gratings using ultra fast pulsed laser

Abstract

Standard glass scale is just like a kind of very precise ruler and on its surface, accurate divisions are equally marked. The standard glass scales are frequently used in calibration of precise instruments with non contact method of measurements like optical microscopes, video microscopes, profile projectors etc. With the help of ultra fast pulsed laser micromachining system devised a state of the art process for manufacturing standard glass scales. The machined standard scales were calibrated using F25 CMM for 10 mm range scale and Profile projector for 150 mm range scale. The results of the calibration shows the accuracy of the Glass scales at par with the scales manufactured by photolithography process.