Effective and active temperature compensation of high-pressure MEMS pressure transducers for aerospace applications

Abstract

In this Paper, we present the effect of active (programmable) temperature compensation for 0-200Bar in house developed Aerospace quality MEMS gauge Pressure Transducers using ZMD based IC. Two numbers of 0-200 Bar Gauge Pressure MEMS Transducer’s raw output (in mV) was compared with temperature and span compensated amplified output values (in Volts). The drift values were calculated. The effect of Nonlinearity+Hysteresis, Full Scale Output (FSO) and Zero Offset for various input temperatures were tabulated and a graph was drawn. A Static hydraulic dead weight calibrator (Fluke Make P3125) was used and a linear relation between Pressure Vs Output was obtained. The raw output data in mV as well as temperature (-40ºC to +80ºC) compensated output (in Volts) was plotted with respect to input Pressure. The Non linearity +Hysteresis value after temperature compensation was found to be 0.3%FSO. Temperature drift values obtained were better than 2 x 10-4/FSO/ºC.