Nithin, Rathnamala Rao, and K. N. Bhat. “Design and Fabrication of Sculptured Diaphragm MEMS Low Range Pressure Sensor”. Manufacturing Technology Today 19, no. 10 (October 1, 2020): 49–53. Accessed April 3, 2025. https://mtt.cmti.res.in/index.php/journal/article/view/114.