VIKAS, G. N.; AGRAWAL, M. Design optimization of silicon cantilever for strain based MEMS position sensor. Manufacturing Technology Today , [S. l.], v. 23, n. 3-4, p. 1–6, 2024. DOI: 10.58368/MTT.23.3-4.2024.1-6. Disponível em: https://mtt.cmti.res.in/index.php/journal/article/view/309. Acesso em: 30 apr. 2025.