KANDPAL, M.; DASS, M.; SINGH, J.; BEHERA, S. N. Experimental analysis of conformality of E–beam deposited thin films for MEMS applications. Manufacturing Technology Today , [S. l.], v. 19, n. 9, p. 51–55, 2020. Disponível em: https://mtt.cmti.res.in/index.php/journal/article/view/128. Acesso em: 21 nov. 2024.