NITHIN; RAO, R.; BHAT, K. N. Design and fabrication of sculptured diaphragm MEMS low range pressure sensor. Manufacturing Technology Today , [S. l.], v. 19, n. 10, p. 49–53, 2020. Disponível em: https://mtt.cmti.res.in/index.php/journal/article/view/114. Acesso em: 19 sep. 2024.